Research Area System Integration for Nano and Micro Systems (SI-NMS)
Group System Integration - Systems, Processes, Equipment (SI-SPE)
Karlsruhe Institute of Technology (KIT) Institute for Automation and Applied Informatics (IAI)
Hermann-von-Helmholtz-Platz 1 76344 Eggenstein-Leopoldshafen
Fax: +49 721 608 22602 Building-No.: 445 / 449 / 668
