System Integration in Micro- and Nanotechnology II

  • Type: Lecture (V)
  • Chair: KIT-Fakultäten - KIT-Fakultät für Maschinenbau - Institut für Automation und angewandte Informatik
    KIT-Fakultäten - KIT-Fakultät für Maschinenbau
  • Semester: WS 20/21
  • Lecturer: Dr. Ulrich Gengenbach
  • SWS: 2
  • Lv-No.: 2105040
  • Information: Online

Introduction to system integration (novel processes and applications)

Assembly of hybrid microsystems

Packaging processes


  • Micro process engineering
  • Lab-on-chip systems
  • Microoptical systems
  • Silicon Photonics

Novel integration processes:

  • Direct Laser Writing
  • Self Assembly

Learning objectives

The students acquire knowledge of novel system integration technologies and their application in microoptic and microfluidic systems.

Language of instructionGerman

N.-T. Nguyen, Fundamentals and Applications of Microfluidics, Artech House

G. T. Reed, Silicon Photonics: An Introduction, Wiley

Organisational issues

Die Vorlesung wird erstmals im WS 2020/21 angeboten.