The lecture gives an introduction to optical measuring systems and optical metrology. Optical metrology offers the advantages of non-contact and fast measurement and is therefore also suitable for direct measurements during the process.

The measuring systems are described on the basis of the underlying physical principles and their practical application is demonstrated using specific examples.

Content:

• Introduction
• Optical measurement principles
• System / Optics and Light
• Optical components
• Optical systems for
• Distance measurement
• Surface measurement
• Gas sensing

Learning objectives:

The students…

• know the basics of optical metrology.
• know different optical measuring principles.
• know the function of optical components.
• are able to find and use the appropriate measuring system for different measuring tasks.

• M. Schuth, W. Buerakov, „Handbuch optische Messtechnik“, Hanser, München (2017)
• „Optische Messtechnik“, In: Hering E., Martin R. (eds) Photonik. Springer, Berlin (2006)
• G. Wiegleb, „Gasmesstechnik in Theorie und Praxis“, Springer Vieweg, Wiesbaden (2016)